International Conference on Microelectronic Test Structures

The Measurement and Characterisation Conference

The International Conference on Microelectronic Test Structures (ICMTS) is the premier conference devoted to the development, measurement and analysis of test structures providing a forum for designers and users of test structures to discuss recent developments and future directions The meeting is a IEEE conference, sponsored by the IEEE Electron Devices Society.

Details of papers presented at previous ICMTS conferences (including 2014) are available from a database - a list of the best papers awarded over the years is also available. In addition the database contains over 2000 papers on test structure related research published in other journals and conferences.

The International Conference on Microelectronic Test Structures is normally held in the March/April of each year with the paper submission date being mid Sept. future meetings are indicated below:

Copies of past ICMTS proceedings are available from the IEEE publications.

Information on the contents of all previous ICMTS proceeding is also available.

If you would like your name added to the mailing list please send your details to Bill Verzi ( Details of who is on the technical committee is available.

Further information can be obtained by contacting A.J. Walton at:

Prof A.J. Walton
Scottish Microelectronics Centre
Institute for Integrated Micro and Nano Systems
School of Engineering
Kings Buildings
University of Edinburgh

Tel: 0131 650 5620 (Direct dial) (International +44 131 650 5620)
Fax: 0131 650 6554 (International +44 131 650 6554)