Nanotechnology and Microelectromechanical Systems (MEMS)

Silicon Carbide MEMS for Harsh Environments

Silicon Carbide is a promising material candidate for the development of microelectromechanical (MEM) systems. Because of its excellent electrical, mechanical and chemical properties, it is suitable for applications in harsh environments. The aim of this project will be to design experimental structures and to develop the challenging processing techniques that are necessary for the realisation of prototype sensors and actuators. Examples of on-going work can be found here:

Piezoelectrically driven SiC resonators

Piezoelectrically driven and sensed SiC resonators

Electrothermally driven SiC resonators

Two-dimensional (2D) materials

On-going research on 2D materials can be seen here:

2D materials

Paper

Graphene MEMS and Electronics

Looking beyond conventional electronics based in silicon, it is conceivable that the next revolution in electronics would be based on the integration of another element with silicon. So far, the most promising candidate element set to revolutionise next generation electronics is carbon. This project aims to focus on the engineering aspect of research in this exciting field - to develop novel methods for the integration of carbon-based materials between metallic electrodes on silicon over large areas. Such a step would provide a fundamental basis for the future development of carbon-based electronics.

MEMS/CMOS biomimetic research

The research project involves the development and implementation of an adaptable micro-electromechanical (MEM) acoustic transducer inspired by the behaviour of the human ear. The detection of the acoustic signal and its conversion into the electrical domain can be performed with resonant gate transistors (RGTs). The active cochlear mechanism of the human ear could be replicated by integrating an array of RGTs with a feedback control system to operate as a selective real-time adaptive multichannel microphone. The potential outcome of this project will have tremendous impact on the fundamental understanding of sound interpretation as well as improvements in hearing aid technology. For on-going research, please see here:

MEMS/CMOS

If you are interested in any of the projects above or have your own project idea that you wish to talk about, please feel free to email me at r.cheung@ed.ac.uk.

Last modified 14-April-2019 11:00:03 GMT