Publications List

Area of SiC MEMS

Boris Svilicic, Graham S. Wood, Enrico Mastropaolo, Rebecca Cheung, "Thermal- and Piezo-Tunable Flexural-Mode Resonator with Piezoelectric Actuation and Sensing", IEEE J. Microelectromechanical Systems, 26, pp 609-615, 2017. (DOI: 10.1109/JMEMS.2017.2680465)

Rebecca Cheung, Graham S. Wood, Enrico Mastropaolo, Boris Svilicic, "Tuning Performance of Silicon Carbide Micro-Resonators", invited paper, Material Science Forum, 897, pp 601-605, 2017.

Boris Svilicic, Graham S. Wood, Enrico Mastropaolo, Rebecca Cheung, "Tunability of Piezoelectric MEMS Ring Resonator Based Filter", Procedia Engineering, 168, pp 1517–1520, 2016. (http://dx.doi.org/10.1016/j.proeng.2016.11.450)

Graham S. Wood, Boris Svilicic, Enrico Mastropaolo and Rebecca Cheung, "3C-Silicon Carbide Microresonators for Timing and Frequency Reference", Micromachines, 7(11), 208, 2016. (doi:10.3390/mi7110208)

Boris Svilicic, Enrico Mastropaolo, Rebecca Cheung, "Tunable MEMS Cantilever Resonators Electrothermally Actuated and Piezoelectrically Sensed", Microelectronic Engineering, 145, pp38-42, 2015.

Boris Svilicic, Enrico Mastropaolo, Rebecca Cheung, "Widely Tunable MEMS Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing for Filtering Applications", Sensors and Actuators A, Physical, 226, pp149-153, 2015.

B. Svilicic, E. Mastropaolo, R. Cheung, "A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing", Procedia Engineering, 87, pp1406 - 1409, 2014.

B. Svilicic, E. Mastropaolo, R. Cheung, "Piezoelectric Sensing of Electrothermally Actuated Silicon Carbide MEMS Resonators", Microelectronic Engineering, 119, pp 24-27, 2014.

Boris Svilicic, Enrico Mastropaolo, Rebecca Cheung, "Two-Port Piezoelectric Silicon Carbide MEMS Cantilever Resonator", Informacije Midem, Vol. 43, 22-26, 2013.

B. Svilicic, E. Mastropaolo, T. Chen and R. Cheung, "Piezo-electrically transduced silicon carbide MEMS double-clamped beam resonators", J. Vac. Sci. and Technol., B, 30, 06FD05, 2012.

E. Mastropaolo, B. Svilicic, T. Chen, B. Flynn and R. Cheung, "Piezo-electrically actuated and sensed silicon carbide ring resonators", Microelectronic Engineering, vol. 97, pp 220-222, 2012.

E. Mastropaolo, G. Wood, I. Gual, P. Parmiter and R. Cheung "Electrothermally Actuated Silicon Carbide Tunable MEMS Resonators", IEEE J. of Microelectromechanical Systems, vol. 21, pp 811-821, 2012.

Raden Dewanto, Tao Chen, Rebecca Cheung, Zhongxu Hu, Barry Gallacher, John Hedley, "Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy", accepted to the presented in IEEE NEMS, March, 2012.

B. Svilicic, E. Mastropaolo, B. Flynn, R. Cheung, "Electrothermally Actuated and Piezoelectrically Sensed Silicon Carbide Tunable MEMS Resonator", IEEE Electron Device Letters, 33, pp 278-280, 2012.

Enrico Mastropaolo and Rebecca Cheung, "Study of 3C-SiC mechanical resonators, filters and mixers", invited paper, Material Science Forum, 711, pp 43-50, 2011.

Enrico Mastropaolo, Isaac Gual, Graham Wood, Andrew Bunting, Rebecca Cheung, "Piezo-electrically driven silicon carbide resonators", J. Vac. Sci. and Technol., B, 28, pp C6N18 - C6N23, 2010.

Enrico Mastropaolo, Isaac Gual, Rebecca Cheung, "Silicon carbide electro-mechanical resonators", Proceedings of the Institution of Mechanical Engineers, Part N, Journal of Nanoengineering and Nanosystems, pp 1-11, 2010.

G.S. Wood, I. Gual, P. Parmiter and R. Cheung, "Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators", Microelectronics Reliability, 50, pp 1977-1983, 2010.

E. Mastropaolo, I. Gual, R. Cheung, "Silicon carbide electrothermal mixer-filters", Electronics Letters, 46, pp 62-63, 2010.

Enrico Mastropaolo, Graham Wood, Rebecca Cheung, "Electro-thermal behaviour of Al/SiC clamped-clamped beams", Microelectronic Engineering, 87, pp 573-575, 2010.

Enrico Mastropaolo, Rebecca Cheung, Anne Henry, Erik Janzen, "Electrothermal actuation of silicon carbide ring resonators", J. Vac. Sci. and Technol., B, 27, pp 3109-3114, 2009.

Enrico Mastropaolo, Rebecca Cheung, Anne Henry and Erik Janzen, "Fabrication of beam resonators from hot-wall chemical vapour deposited SiC", Microelectronic Engineering, 86, pp. 1194-1196, 2009. doi:10.1016/j.mee.2008.11.016

Liudi Jiang and Rebecca Cheung, "A review of silicon carbide development in MEMS applications", International Journal of Computational Materials Science and Surface Engineering, vol.2, pp 227-242, 2009.

Enrico Mastropaolo and Rebecca Cheung, "Electrothermal actuation studies on Silicon Carbide resonators", J. Vac. Sci. and Technol. B, 26, pp. 2619-2623, 2008. DOI: 10.1116/1.3013862

Anne Henry, Erik Janzen, Enrico Mastropaolo and Rebecca Cheung, "Single crystal and polycrystalline 3C-SiC for MEMS applications", Material Science Forum, Vols. 615-617, pp 625-628, Trans Tech Publications, 2009; presented at the 7th European Conference on Silicon Carbide and Related Materials 2008.

Rebecca Cheung and Petros Argyrakis, "Micro-scale Sensors based in Silicon Carbide and Silicon", Proceedings of the Institution of Mechanical Engineers, Part C, Journal of Mechanical Engineering Science, Special Issue on Microsystems Technology, pp 19-26, 2008.

Michele Pozzi, Alun J. Harris, James S. Burdess, Petros Argyrakis, Kin K. Lee, Rebecca Cheung, Gordon J. Phelps, Nicholas G. Wright, "Design, fabrication, and testing of 3C-SiC sensors for high-temperature applications", presented at the SPIE on Microelectronics, MEMS and Nanotechnology 2007; Proceedings of SPIE Volume 6800, 68001S, 2008.

M. Pozzi, J. S. Burdess, A. J. Harris, G. J. Phelps, N. G. Wright, K. K. Lee, R. Cheung, C. A. Zorman and M. Mehregany, "Mechanical properties of polycrystalline 3C-SiC films between room temperature and 600 degrees C", presented at the International Conference on Materials for Advanced Technologies, ICMAT 2007; MEMS Technology and Devices, pp. 230-3, edited by A Liu, J Wu, C Lu and C D Reddy, Pan Stanford, 2007.

Michele Pozzi, Musaab Hassan, Alun J. Harris, Jim S. Burdess, Kin K. Lee, Rebecca Cheung, Gordon J. Phelps, Nick G. Wright, Christian A. Zorman and Mehran Mehregany, "Mechanical properties of a 3C-SiC layer between RT and 600 degrees C", Journal of Physics D: Applied Physics, 40, pp 3335-3342, 2007.

Stefan Enderling, John Hedley, Liudi Jiang, Rebecca Cheung, Christian Zorman, Mehran Mehregany and Anthony Walton, "Characterisation of frequency tuning using focused ion beam platinum deposition", J. of Micromechanics and Microengineering, 17, pp1-7, 2007.

"Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) for Harsh Environments", edited by R. Cheung, Imperial College Press, 2006.

P. Argyrakis, P. McNabb, A.J. Snell and R. Cheung, "Relaxation of process-induced surface stress in amorphous silicon carbide thin films using low energy ion bombardment", Appl. Phys. Letts., 89, pp 034101-1-3, 2006.

L. Jiang, R. Cheung, J. Hedley, M. Hassan, A.J. Harris, J.S. Burdess, C.A. Zorman and M. Mehregany, "SiC cantilever resonators with electrothermal actuation", Sensors and Actuators A, 128, pp 376-386, 2006.

L. Jiang, S. Anderson, E. Thong, R. Cheung, C. A. Zorman, and M. Mehregany, "Fabrication of Hall Device Structures in 3C-SiC using Micro-Electro-Mechanical Processing Technology", Microelectronic Engineering, 83, pp 1396-1399, 2006.

R. Cheung, "Fabrication and Characterisation of 3C-SiC Resonators", International Topical Workshop on Heteroepitaxy of 3C-SiC on Silicon and its Application to Sensor Devices, Krippen, Germany, April, 2005.

L. Jiang, R. Cheung, M. Hassan, A.J. Harris, J.S. Burdess, C.A. Zorman and M. Mehregany, "Dry release fabrication and testing of SiC electrostatic cantilever actuators", Microelectronic Engineering, 78-79, pp 106-111, 2005.

S. Enderling, L. Jiang, A.W.S. Ross, S. Bond, J. Hedley, A. J. Harris, J. S. Burdess, R. Cheung, C. A. Zorman, M. Mehregany and A. J. Walton, "MEMS resonator tuning using focussed ion beam platinum deposition", presented at Nanotech 2004, Boston, March 2004.

Liudi Jiang and R. Cheung, "Impact of Ar addition to inductively coupled plasma etching of SiC in SF6/O2", Microelectronic Engineering, 73-74, pp 306-311, 2004.

Liudi Jiang and R. Cheung, "Inductively coupled plasma etching of SiC using SF6/O2/Ar gas mixtures", presented at the International Conference on Micro- Nano- Engineering, Cambridge, Sept 2003.

L. Jiang, N.O.V. Plank, R. Cheung, M. A. Blauw and E. van der Drift, "Dry etching of SiC in inductively coupled Cl2/Ar plasma", Journal of Physics D; Applied Phys., 37, pp 1809-1814, 2004.

L. Jiang, N.O.V. Plank, R. Cheung, M. A. Blauw and E. van der Drift, "Dry etching of SiC in inductively coupled Cl2/Ar plasma", presented in the 47th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, May, 2003.

L. Jiang, R. Cheung, M. Hassan, A. J. Harris, J. S. Burdess, C. A. Zorman and M. Mehregany, "Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching", J. Vac. Sci. and Technol., B21, 2998, 2003. Also selected for the December 22, 2003 issue of Virtual Journal of Nanoscale Science & Technology.

L. Jiang, R. Cheung, M. Hassan, A. J. Harris, J. S. Burdess, C. A. Zorman and M. Mehregany, "Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching", presented in the 47th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, May, 2003.

N.O.V. Plank, Liudi Jiang, A. M. Gundlach and R. Cheung, "The Electrical Characteristics of 4H-SiC Schottky Diodes after ICP etching", Journal of Electronic Materials, 32, pp 964-971, 2003.

L. Jiang, R. Cheung; "Dry etching of SiC using SF6/O2 inductively coupled plasma", Dry etching - advances and trends, Institute of Physics Conference, London, 22nd Jan. 2003.

N.O.V. Plank, M.A. Blauw, E. van der Drift, R. Cheung; "The etching of silicon carbide in inductively coupled SF6/O2 plasma", Journal of Physics D; Applied Phys., 36, pp 482-487, 2003.

L. Jiang, R. Cheung, R. Brown, A. Mount; "Inductively coupled plasma etching of SiC in SF6/O2 and etch-induced surface chemical bonding modifications", Journal of Applied Physics, 93, pp. 1376-1383, 2003.

L. Jiang, N. Plank, R. Cheung; "Surface characterisation of inductively coupled plasma etched SiC in SF6/O2", Microelectronic Engineering, 67-68, pp 369-375, 2003.

N. Plank, L. Jiang, A.M. Gundlach, R. Cheung; "The effect of plasma etching on the electrical characteristics of 4H-SiC Schottky diodes", Proceedings of the 4th European Conference on Silicon Carbide and Related Materials, Sept. 2002; Materials Science Forum, Vol 433-436, pp 689-692, 2003.

Area of Biomimetic MEMS, Micro and Nano Patterning

Asaad K. Al-mashaal, Graham S. Wood, Alberto Torin, Enrico Mastropaolo, Michael J. Newton and Rebecca Cheung, "Tunable Graphene-Polymer Resonators for Audio Frequency Sensing Applications", IEEE Sensors Journal, 2018. (doi: 10.1109/JSEN.2018.2877463)

L. Camellini, A. Torin, A. Al-masha'al, G. Wood, M. Newton, R. Cheung and E. Mastropaolo, "Fabrication and modal characterisation of large-area polymer membranes for acoustic MEMS devices", Micro and Nano Letters, 2018. (doi: 10.1049/mnl.2018.0089)

A. Al-masha'al, G. Wood, E. Mastropaolo and R. Cheung, "Electrostatically driven long-microbeams for low frequency applications", Electronics Letters. 54, pp 372-374, 2018.

A. Al-masha’al, E. Mastropaolo, A. Bunting, C. Dunare and R. Cheung, "Fabrication and characterisation of suspended microstructures of tantalum", Journal of Micromechanics and Microengineering, 27, 015020, 2017.

Asa'ad Al-Masha'al, Andrew Bunting and Rebecca Cheung, "Evaluation of residual stress in sputtered tantalum thin-film", Applied Surface Science, 371, pp 571-575, 2016.

Shiwei Wang, Thomas Jacob Koickal, Alister Hamilton, Rebecca Cheung, and Leslie S. Smith, "A Power-Efficient Capacitive Read-Out Circuit with Parasitic-Cancellation for MEMS Cochlea Sensors", IEEE Transactions on Biomedical Circuits and Systems 2015. (DOI: 10.1109/TBCAS.2015.2403251)

Shiwei Wang, Thomas Jacob Koickal, Alister Hamilton, Rebecca Cheung, and Leslie S. Smith, "A Bio-realistic Analog CMOS Cochlea Filter with High Tunability and Ultra-Steep Roll-Off", Vol. PP, p 1-15, IEEE Transactions on Biomedical Circuits and Systems 2014. (DOI: 10.1109/TBCAS.2014.2328321)

Enrico Mastropaolo, Rhonira Latif, Eldad Grady and Rebecca Cheung, "Control of stress in tantalum thin films for the fabrication of 3D MEMS structures", J. Vac. Sci. and Technol., B 31, 06FD02-1, 2013.

D. Thuau, V. Koutsos and R Cheung, "Stress relaxation of polyimide (PI) cantilevers using low energy ion bombardment", J. of Soft Materials, 11:4, 414-420, 2013.

Enrico Mastropaolo, Rhonira Latif, Thomas Koickal, Alister Hamilton, Rebecca Cheung, Michael Newton, Leslie Smith, "Bimaterial electromechanical systems for a biomimetical acoustic sensor", J. Vac. Sci. Technol. B 30, 06FD01, 2012.

Rhonira Latif, Enrico Mastropaolo, Andy Bunting, Thomas Koickal, Michael Newton, Alister Hamilton, Leslie Smith and Rebecca Cheung, "Low frequency tantalum electromechanical systems for biomimetical applications", J. Vac. Sci. and Technol., B29, 06FE05, 2011.

T. Koickal, R. Latif, L. Gouveia, E. Mastropaolo, S. Wang, A. Hamilton, R. Cheung, M. Newton, L. Smith, "Design of a Spike Event Coded RGT Microphone for Neuromorphic Auditory Systems", Proc. IEEE International Symposium on Circuits and Systems (ISCAS), Rio de Janeiro, Brazil, p. 2465, 2011.

D. Thuau, I. Koymen and R. Cheung, "A microstructure for thermal conductivity measurement of conductive thin films", Microelectronic Engineering, 88, pp 2408-2412, 2011.

Rhonira Latif, Enrico Mastropaolo, Andy Bunting, Thomas Koickal, Michael Newton, Alister Hamilton, Leslie Smith and Rebecca Cheung, "Microelectromechanical Systems for Biomimetical Applications", J. Vac. Sci. and Technol., B28, pp C6N1 - C6N6, 2010.

P. Argyrakis and R. Cheung, "Plastic deformation magnetic assembly of out-of-plane structures using vapour phase hydrofluoric acid release", Microelectronic Engineering, 86, pp 2176-2179, 2009.

Y. Zhang, A. Hamilton, R. Cheung, B. Webb, P. Argyrakis and T. Gonos, "Integration of wind sensors and analogue VLSI for an insect-inspired robot", presented in the 9th International Work-Conference on Artificial Neural Networks (IWANN), 2007.

P. Argyrakis, R. Cheung, A. Hamilton, B. Webb, Y. Zhang and T. Gonos, "Fabrication and characterization of a biomorphic wind sensor for integration with a neuron circuit", Microelectronic Engineering, 84, pp 1749-1753, 2007.

E. Mastropaolo, A. M. Gundlach, C. Fragkiadakis, P. B. Kirby and R. Cheung, "Reactive Ion Etching (RIE) of Zinc Oxide (ZnO) in SiCl4 based plasmas", Electronics Letters, 43, pp 1467-1469, 2007.

T. Zhu, P. Argyrakis, E. Mastropaolo, I. Gual, K. Lee and R. Cheung, "Dry etch release processes for micromachining applications", J. Vac. Sci. and Technol. B, 25, pp 2553-2557, 2007.

M.M.Alkaisi, R.J.Blaikie, S.J.McNab, R.Cheung, D.R.S.Cumming; "Sub-diffraction-limited patterning using evanescent near field optical lithography", Technical Digest of MAIR/OITDA Workshop on Ultrahigh Density Optical Storage and Related Techniques, 7-8 March 2000.

K.K. Ma, R.J. Blaikie, R. Cheung, D.R.S. Cumming; "Monolithic millimetre-wave and terahertz rectangular waveguide technology", Proceedings of 6th Electronics New Zealand Conference (ENZCon99), pp 135-140, 21-22 September 1999.

H. Chen, R.J. Blaikie, R. Cheung, M.M. Alkaisi; "Nanolithography using reactive ion etched silicon nitride phase masks", Proceedings of 6th Electronics New Zealand Conference (ENZCon99), pp. 125-130, 21-22 September 1999.

M.M.Alkaisi, R.J.Blaikie, S.J.McNab, R.Cheung, D.R.S.Cumming; "Patterning of 70nm features on 140nm period using evanescent near-field optical lithography (ENFOL)", Appl. Phys. Lett., 75, pp 3560-3562, 1999.

R.J.Blaikie, M.M.Alkaisi, S.J.McNab, D.R.S.Cumming, R.Cheung; "Nanolithography using optical contact exposure in the evanescent near field", Microelectronic Engineering, 46, pp 85-88, 1999.

H.Devereux, R.Cheung; "Low temperature reactive ion etching of silicon for micromachining", Proceedings of Fifth Electronics New Zealand Conference, pp 90-93, Sept. 1998.

S.J.McNab, R.J.Blaikie, M.M.Alkaisi, D.R.S.Cumming, R.Cheung; "Extending the resolution of optical lithography using the evanescent near field", Proceedings of Fifth Electronics New Zealand Conference, pp 106 - 109, Sept. 1998.

R.J.Blaikie,, D.R.S.Cumming, R.Cheung; "A review of fine line lithography", Proceedings of Fifth Electronics New Zealand Conference, 1998.

Area of Carbon Nanotubes, Graphene and 2D Materials

A. Al-masha'al, G. Wood, A. Torin, E. Mastropaolo, M. Newton and R. Cheung, "Dynamic behavior of ultra large graphene-based membranes using electrothermal transduction" Applied Physics Letters, 111, 24, 243503, 2017.

Rui Zhang, Daniel Drysdale, Vasileios Koutsos, and Rebecca Cheung, "Controlled Layer Thinning and p-Type Doping of WSe2 by Vapor XeF2", Advanced Functional Materials, 27, 1702455, 2017. (https://doi.org/10.1002/adfm.201702455)

Christian Nunez-Alvarez, Rebecca Cheung, John Thompson, "Performance Analysis Of Hybrid Metal-Graphene Frequency Reconfigurable Antennas For The Microwave Regime", IEEE Transactions on Antennas and Propagation, 65, pp 1558-1569, 2017. (DOI: 10.1109/TAP.2017.2670327)

Rui Zhang and R. Cheung, "Mechanical Properties and Applications of Two-dimensional Materials", InTech, 2016. (DOI: 10.5772/104209)

Rui Zhang, Vasileios Koutsos, and Rebecca Cheung, "Elastic properties of suspended multilayer WSe2", Applied Physics Letters, 108, 042104, 2016.

Rui Zhang, Tao Chen, Andrew Bunting, and Rebecca Cheung, "Optical lithography technique for the fabrication of devices from mechanically exfoliated two-dimensional materials", Microelectronic Engineering, 154, pp 62-68, 2016.

T.Chen, E.Mastropaolo, A. Bunting and R. Cheung, "Observation of second flexural mode enhancement in graphene resonators", Electronics Letters, 51, pp 1014-1016, 2015.

Eldad Grady, Enrico Mastropaolo, Tao Chen, Andrew Bunting, Rebecca Cheung, "Low frequency graphene resonators for acoustic sensing", Microelectronic Engineering, 119, pp 105-108, 2014.

Christian Nunez Alvarez, Rebecca Cheung and John S. Thompson, "Graphene Reconfigurable Antennas For LTE And WIFI Systems", IEEE Antennas and Propagation Conference, (LAPC), 2014. DOI: 10.1109/LAPC.2014.6996418

D. Thuau, V. Koutsos and R. Cheung, "Stress relaxation of polyimide (PI) cantilevers using low energy ion bombardment", J. of Soft Materials, 11:4, 414-420, 2013.

Tao Chen, Enrico Mastropaolo, Andrew Bunting, Tom Stevenson, and Rebecca Cheung, "Optimization of the visibility of graphene on poly-Si film by thin-film optics engineering", J. Vac. Sci. and Technol. B 30, 06FJ01, 2012.

D. Thuau, V. Koutsos and R. Cheung, "Electrical and Mechanical Properties of Carbon Nanotubes-Polyimide (CNT-Pi) Composites", J. Vac. Sci. and Technol., B, 27, pp 3139-3144, 2009.

I. Bright, V. Koutsos, Q. Li and R. Cheung, "Carbon nanotubes for integration into nanocomposite materials", Microelectronic Engineering, 83, pp 1542-1546, 2006.

I. Bright, V. Koutsos and R. Cheung, "Carbon Nanotubes for Integration with Polymers", presented at the Royal Society of Chemistry, Materials Conference, Functional Materials for the 21st Century, Edinburgh, July, 2005.

N.O.V. Plank, G.A. Forrest, A.J. Alexander, and R. Cheung, " n-type carbon nanotube devices prepared by CF4 plasma-fluorination and amino-functionalisation", Journal of Physical Chemistry B, 109, pp 22096 - 22101, 2005.

I. Bright, V. Koutsos and R. Cheung, "Carbon Nanotube Growth for Integration into Nanocomposites", presented at the International Conference on Micro- Nano- Engineering, Vienna, Sept., 2005.

N.O.V. Plank, M. Ishida and R. Cheung, "Positioning of carbon nanotubes using soft-lithography for electronics applications", J. Vac. Sci. and Technol. B23, pp 3178 - 3181, 2005.

P. Argyrakis, L. Teo, T. Stevenson and R. Cheung, "Fabrication of PDMS Stamps for the Patterned Growth of Carbon Nanotubes", Microelectronic Engineering, 78-79, pp 647-652, 2005.

N.O.V. Plank and R. Cheung, "Functionalisation of carbon nanotubes in a plasma", NT'04, July, 2004.

N.O.V. Plank, R. Cheung and R. J. Andrews, "Thiolation of single-wall carbon nanotubes and their self-assembly", Appl. Phys. Letts., 85, pp 3229-3231, 2004.

N.O.V. Plank and R. Cheung, "Functionalization of carbon nanotubes for molecular electronics", Microelectronic Engineering, 73-74, pp 578-582, 2004.

N.O.V. Plank, Liudi Jiang and R. Cheung, "Fluorination of carbon nanotubes in CF4 plasma", Appl. Phys. Letts., 83, pp 2426-2428, 2003. Also selected for the September 29, 2003 issue of the Virtual Journal of Nanoscale Science & Technology.

Area of Frequency Selective Surfaces

J. Sanz-Fernandez, C. Mateo-Segura, R. Cheung, G. Goussetis, M.P.Y. Desmulliez, "Near-field enhancement for IR sensor applications", J. of Nanophotonics, 5, 051814, 2011. doi:10.1117/1.3604785

Juan-Jose Sanz-Fernandez, Rebecca Cheung, George Goussetis and Carolina Mateo-Segura, "Power Stored and Quality Factors in Frequency Selective Surfaces at THz Frequencies", IEEE Transactions on Antennas and Propagation, 59, pp2205-2216, 2011.

Juan-Jose Sanz-Fernandez, Carolina Mateo-Segura, Rebecca Cheung and George Goussetis, "Near-field enhancement for IR sensor applications", invited paper presented at Medinano, Belgrade, October, 2010.

J. Sanz-Fernandez, G. Goussetis and R. Cheung, "Tunable 2D Electromagnetic Band-Gap (EBG) Structures based on Micro-Electro-Mechanical Systems (MEMS) for THz frequencies", presented at the IEEE AP-S International Symposium on Antennas and Propagation, Toronto, July, 2010.

R. Dickie, J. Sanz-Fernandez, R. Cahill, R. Cheung, G. Goussetis, H. Gamble, V. Fusco, M. Henry, M. Oldfield, P. Huggard, P. Howard, N. Grant, Y. Munro, P. de Maagt, "Frequency-selective surfaces for submillimetre and THz applications", 2nd UK/Europe-China Workshop on Millimetre Waves and Terahertz Technologies, Oxford, UK, October, 2009.

Juan-Jose Sanz-Fernandez, George Goussetis and Rebecca Cheung, "Perturbed Frequency-Selective Surfaces Fabricated on Large Thin Polymer Membranes for Multiband Infrared Applications", J. Vac. Sci. and Technol., B, 27, pp 3169-3174, 2009.

J. Sanz-Fernandez, G. Goussetis and R. Cheung, "Quality factor of frequency selective surfaces at infrared," IEEE AP-S International Symposium on Antennas and Propagation proceedings; presented at the IEEE AP-S International Symposium on Antennas and Propagation and USNC/URSI National Radio Science Meeting, South Carolina, USA, 2009.

C. Mateo-Segura, J. Sanz-Fernandez, G. Goussetis and R. Cheung, "Structured planar surfaces exhibiting strong near-field enhancement at FIR", presented at Photon'08, Edinburgh, 2008.

George Goussetis, Alexandros P. Feresidis and Rebecca Cheung, "Performance of Subwavelength Resonant Cavities at FIR", presented at IEEE International Symposium Antennas and Propagation Society, 2007.

George Goussetis, Alexandros P. Feresidis and Rebecca Cheung, "Quality Factor Assessment of Subwavelength Resonant Cavities at FIR Frequencies", Journal of Optics A: Pure Appl. Opt., 9, pp S355-S360, 2007.

George Goussetis, Alexandros P. Feresidis and Rebecca Cheung, "Quality Factor Assessment of Subwavelength Resonant Microcavities at FIR", presented in Nanometa 2007.

Area of GaN and CN

R. Cheung, B. Rong, E. van der Drift, W.G. Sloof; "Etch mechanism and etch-induced effects in the inductively coupled plasma (ICP) etching of GaN", Journal of Vacuum Science and Technology B, 21, pp 1268-1272, 2003.

L. Jiang, A.G. Fitzgerald, M.J. Rose, R. Cheung, B. Rong, E. van der Drift; "X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films", Applied Surface Science, 193, pp 144-148, 2002.

L. Jiang, A.G. Fitzgerald, M.J. Rose, A.M. Gundlach, R. Cheung; "Effect of Reactive Ion Etching on Amorphous Carbon Nitride Films", Journal of Surface and Interface Analysis, 34, pp 728-731, 2002.

S.A. Brown, R.J. Reeves, A. Markwitz, R. Cheung, C. Kirchner, M. Kamp; "Optical properties of gallium nitride", Invited talk at the workshop for advanced materials produced and analysed with ion beams, 10-12 July, 2001.

B. Rong, E. van der Drift, R.J. Reeves, R. Cheung; "Inductively coupled plasma (ICP) etching of GaN and its effect on electrical characteristics", J. Vac. Sci. and Technol., 19, pp 2917-2920, 2001.

B. Rong, R.J. Reeves, S.A. Brown, M.M. Alkaisi, E. van der Drift, R. Cheung; "A study of reactive ion etching damage effects in GaN", Microelectronic Engineering, 57/58, pp 585-591, 2001.

R. Cheung, R.J. Reeves, S.A. Brown, M. Kamp; "Nanostructure fabrication and optical memory in GaN", Proceedings of the 18th General Conference of the condensed matter division of the European Physical Society, p247, March 2000.

S.A. Brown, R.J. Reeves, R. Cheung, C. Kirchner, M. Kamp; "Argon plasma etching of gallium nitride: spectroscopic surprises", presented in the 8th International symposium, "Nanostructures: Physics and technology", June, 2000.

R. Cheung; "Process-induced defects and optical memory in GaN", Invited talk at the Condensed Matter and Material Physics Conference 2000, p50, Dec. 2000.

R.J. Reeves, B. Rong, O. Dickie, R. Cheung, S.A Brown; "Photoluminescence and photoconductivity studies of reactive-ion-etched GaN on SiC substrates", Presented at the International Workshop on Nitride Semiconductors 2000, 24-27 September 2000.

R.J. Reeves, S.A. Brown, C.S. Haase, B. Rong, R. Cheung, C. Kirchner, M. Kamp; "Origin of the yellow luminescence in Gallium Nitride: Importance of metastability and blue luminescence", Proceedings of the 25th International Conference on the Physics of Semiconductors, 17-22 September 2000.

R. Cheung, R.J. Reeves, S.A. Brown, E. van der Drift, M. Kamp; "Effects of dry processing on the optical properties of GaN", Journal of Appl. Phys., 88, pp 7110-7114, 2000, ISSN 0021-8979 [RAE2001:Cheung03]

R. Cheung, R.J. Reeves, S.A. Brown; "Process-induced defects and optical memory in GaN", Trans Tech publications, Defects and Diffusion in Ceramics Series,, pp 61-70, 2000.

R. Cheung, J. Hay, W. Gao, E. van der Drift; "Improvement of contact resistances on plasma-exposed Silicon Carbide", Solid State Electronics, 44, pp 2081-2083, 2000.

B. Rong, R. Cheung, W. Gao, M.M. Alkaisi, R.J. Reeves; "Effects of Reactive ion etching on the electrical characteristics of GaN", J. Vac. Sci. Technol., 18, pp 3467-3470, 2000.

S.A. Brown, R.J. Reeves, B. Rong, R. Cheung, M Seyboth, C. Kirchner, M. Kamp; "Argon plasma etching of gallium nitride: spectroscopic surprises", Nanotechnology, 11, pp 1-7, 2000.

B.Rong, R.Cheung, W.Gao; "Fabrication of Nanostructures in GaN", Microelectronic Engineering, 53, pp 419-422, 2000.

S.A.Brown, R.J.Reeves, R.Cheung, C.Kirchner, M.Kamp; "Long-period time-dependent luminescence in reactive ion etched GaN", Physica E, pp 958-962, 2000.

E.Walsby, R.Cheung, R.J.Blaikie, D.R.S.Cumming; "Fabrication of THz diffractive optical lenses", SPIE proceedings on Micromachine Technology for Diffractive and Holographic Optics, September 1999.

B.Rong, R.Cheung, W.Gao; "Fabrication of Nanostructures in GaN", presented in Micro- and Nano- Engineering, Sept 1999.

R.Cheung, R.J.Reeves, S. Withanage, E. van der Drift, M. Kamp,; "Reactive ion etching of GaN and etch-induced surface damage", presented in 43rd International conference on Electron, Ion and Photon Beam Technology and Nanofabrication, June, 1999.

R. Cheung; "Nano-find could rock disc world", Newsletter of the Marsden Fund administered by the Royal Society of New Zealand, pp. 1-2, December 1999.

L.S. Pilliing, R. Cheung, R. Ruennemeyer; "The dynamics and etching patterns in reactive ion etching of silicon for future chip designs", Proceedings of 6th Electronics New Zealand Conference (ENZCon99), pp 120-124, 21-22 September 1999.

R. Cheung, B. Rong, W. Gao; "Nanostructure pattern transfer in GaN", Proceedings of 6th Electronics New Zealand Conference (ENZCon99), pp 131-134, 21-22 September 1999.

S.A.Brown, R.J.Reeves, R.Cheung, C.Kirchner, M.Kamp; "Long-period time-dependent luminescence in reactive ion etched GaN", presented in 9th international conference on modulated semiconductor structures,, 1999.

S.A.Brown, R.Cheung, R.J.Reeves, I. Ben-Yaacov, S.Withanage, M.Schauler, M. Kamp; "Optical study of dry etched III-nitride semiconductors", presented at the 23rd Annual Condensed Matter Physics Meeting, 1999.

S.A.Brown, R.J.Reeves, C.S. Haase, R.Cheung, C.Kirchner, M.Kamp; "Reactive ion etched gallium nitride : metastable defects and yellow luminescence", Appl. Phys. Lett., 75, pp 3285-3287, 1999.

R.Cheung, R.J.Reeves, S. Withanage, E. van der Drift, M. Kamp; "High resolution reactive ion etching of GaN and etch-induced effects", J. Vac. Sci. Technol., B17, pp. 2759-2763, 1999, ISSN 1071-1023. [RAE2001:Cheung02]

R.Cheung, R.J.Reeves, S.A.Brown, S.Withanage, I.Ben-Yaacov, M.Kamp; "Reactive ion etch-induced effects on the near-band-edge luminescence in GaN", Appl. Phys. Lett., 74, pp 3185-3187, 1999, ISSN 0003-6951. [RAE2001:Cheung01]

Area of InP, SiGe and GaAs heterostructure transistors and low dimensional structures

R.Cheung, W.Patrick, W. Baechtold; "Depletion and enhancement mode InP high electron mobility transistors fabricated by a dry gate recess process", Proceedings of Fifth International Conference on Solid State and Integrated Circuit Technology, pp 598-601, Oct. 1998.

R.Cheung, P.Sutter, W.Patrick; "Effects on the scattering life times in InP heterostructures after dry etching", Solid State Electronics, 41, pp 493-495, 1997.

H.C.Duran, R.Cheung, W.Patrick, W.Bachtold, I.Pfund, G.Haehner; "An investigation of various post-RIE cleaning processes for dry etched InP-based HEMTs", Microelectronic Engineering, 35, pp 67-70, 1997.

W.Baechtold, W.Patrick, M. Schefer, U.Klepser, R.Cheung, H.Duran, Hp. Meier; "InP HEMT Technology for Microwave and Gigabit Electronics", Jan. 1996.

E.van der Drift, R.Cheung, T.Zijlstra; "Dry etching and induced damage", Microelectronic Engineering, special issue on Nanotechnology, 32, pp 241-253, 1996, ISSN 0167-9317. [RAE2001:Cheung04]

H.C.Duran, B.Klepser, W.Patrick, R.Cheung, W.Bachtold; "Low noise performance of dry etched InGaAs/InAlAs HEMTs in comparison with wet recessed devices", Proceedings of the 8th Int. Conference on InP and related materials, p372, 1996.

R.Cheung, W.Patrick, I.Pfund, G.Haehner; "Reactive ion etch-induced effects on 0.2 micron T-gate In0.52 Al0.48 As/In0.53 Ga0.47 As/InP HEMTs", J. Vac. Sci. Technol., B14, pp 3679-3683, 1996.

E.van der Drift, T.Zijlstra, E.Fakkeldij, R.Cheung, K.Werner, S.Radelaar; "XPS study on dry etching of Si/Gex Si1-x ", Microelectronic Engneering, 27, pp 481-485, 1995.

R.Cheung, L.J.Geerligs, J.Caro, A.H.Verbruggen, K.Werner, S.Radelaar,; "Weak localisation and correlations effects in a two dimensional hole gas", Physica B, 194-196, pp 1225-1226, 1994.

E.van der Drift, T.Zijlstra, R.Cheung, K.Werner, S.Radelaar; "Reactive ion etching mechanism study on Si/Gex Si1-x ", Microelectronic Engineering, 23, pp 343-348, 1994.

V.Kuznetsov, R.Cheung, K.Werner, E.van der Drift, J.Metselaar, S.Radelaar; "Fabrication and characterisation of p-channel Si/SiGe MODFET", Nov. 1993.

P.Nommensen, R.Cheung, L.J.Geerligs, K.Werner, S.Radelaar; "SiGe Coulomb island in a high impedance environment", May, 1993.

R.Cheung, L.J.Geerligs, J.Caro, A.H.Verbruggen, K.Werner, S.Radelaar; "Inelastic scattering in a two-dimensional hole gas in Si/SiGe heterostructures", May, 1993.

R.Cheung; "Damage assessment of dry etched III-V semiconductors for nanoelectronics", Plasma processing of materials, Material Science Forum (Trans Tech Publications, Switzerland) series, edited by J.J Pouch and S.A.Alterovitz (NASA Lewis Research Centre);, 140-142, pp. 619-640, 1993.

R.Cheung, T.Zijlstra, E.van der Drift, L.J.Geerligs, K.Werner, S.Radelaar; "High resolution reactive ion etching and damage effects in the Si/Gex Si1-x system", J. Vac. Sci. Technol., B11, pp 2224-2228, 1993.

R.Cheung et. al.; "Reactive ion etching induced damage in GaAs and Al0.3 Ga0.7 As using SiCl4 ", Semiconductor Science and Technology, 7, pp 1189-1198, 1992.

P.D.Wang, C.M.Sotomayor-Torres, M.Foad, S.Thoms, M.Watt, R.Cheung, C.D.W.Wilkinson, S.P.Beaumont; "Raman scattering of coupled LO phonon-plasmon modes in RIE n+ GaAs", Journal of Applied Physics, 71, pp 3754-3759, 1992.

G.F.Doughty, R.Cheung, M.A.Foad, M.Rahman, N.I.Cameron, N.P.Johnson, P.D.Wang, C.D.W.Wilkinson; "Nanostructure Fabrication: Dry etching damage", Proceedings of Material Research Society, Fall meeting, Dec. 1991.

W.Hansen, T.P.Smith III, D.P.Divincenzo, K.Y.Lee, Y.H.Lee, R.Cheung; "Quantum fluctuations in n+ GaAs wires with invasive probes", Surface Science, 229, pp 321-325, 1990.

R.Cheung, A.Birnie, J.N.Chapman, S.Thoms, C.D.W.Wilkinson; "Evaluation of dry etch damage in Nano-structures by direct Transmission Electron Microscopic Examination", Microelectronic Engineering, 11, pp 591-594, 1990.

Y.S.Tang, R.Cheung, C.D.W.Wilkinson; "Fabrication of sub-50nm poly-Si/ SiO2 /Si narrow wires using electron beam lithography and CF4 / O2 reactive ion etching", IEE Electronics letters, 26, pp. 1823-1824, 1990.

S.P.Beaumont, C.D.W.Wilkinson, S.Thoms, R.Cheung, I.McIntyre, R.P.Taylor, M.L.Leadbeater, P.C.Main, L.Eaves; "Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems", Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989), 13-15 March 1989.

R.Cheung et al.; "A comparison of damage in the dry etching of GaAs by conventional reactive ion etching and by reactive ion etching with an electron cyclotron resonance generated plasma", J. Vac. Sci. Technol., B7, pp 1462-1466, 1989.

R.Cheung, Y.H.Lee, C.M.Knoedler, K.Y.Lee, T.P.Smith III, D.P.Kern; "Sidewall damage in n+ GaAs quantum wires from reactive ion etching", Appl. Phys. Lett., 54, pp 2130-2132, 1989.

R.Cheung, S.Thoms, I.McIntyre, C.D.W.Wilkinson, S.P.Beaumont; "Passivation of donors in electron-beam lithographically defined nanostructures after methane/hydrogen reactive ion etching", J. Vac. Sci. Technol., B6, pp 1911-1914, 1988.

M.Watt, C.M.Sotomayor-Torres, R.Cheung, C.D.W.Wilkinson, H.E.G.Arnot, S.P.Beaumont; "Raman scattering of reactive ion etched GaAs", Journal of Modern Optics, 35, pp 365-370, 1988.

M.Watt, C.M.Sotomayor-Torres, R.Cheung, C.D.W.Wilkinson, H.E.G.Arnot, S.P.Beaumont; "Raman scattering investigations of the damage caused by reactive ion etching of GaAs", Superlattices and Microstructures, 4, pp 243-244, 1988.

S.Thoms, I.McIntyre, S.P.Beaumont, M.Al-Mudares, R.Cheung, C.D.W.Wilkinson; "Fabrication of quantum wires in GaAs/AlGaAs heterolayers", J. Vac. Sci. Technol., B6, pp 127-130, 1988.

M.Watt, C.M.Sotomayor-Torres, R.Cheung, C.D.W.Wilkinson, H.E.G.Arnot, S.P.Beaumont; "Raman scattering of reactive ion etched GaAs", Proceedings of Quantum Electronics 8, Sept, 1987.

G.F.Doughty, S.Thoms, R.Cheung, C.D.W.Wilkinson; "Dry etching damage to GaAs and InP", Proceedings of 6th int. conference on ion and plasma assisted techniques, pp 284-289, May, 1987.

M.Watt, C.M.Sotomayor-Torres, R.Cheung, C.D.W.Wilkinson, H.E.G.Arnot, S.P.Beaumont; "Raman scattering of reactive ion etched GaAs", Proceedings of IOP Solid State Conf., Dec. 1987.

R.Cheung, S.Thoms, S.P.Beaumont, G.Doughty, V.Law, C.D.W.Wilkinson; "Reactive ion etching of GaAs using a mixture of methane and hydrogen", IEE Electronics Letters, 23, pp 857-859, 1987.