ICMTS Best Paper Awards

2015 Phoenix, USA

S. Mori, K. Ogawa, H. Oishi, T. Suzuki, M. Tomita M. Bairo, Y. Fukuzaki, and H. Ohnuma, “Monitoring Test Structure for Plasma Process Induced Charging Damage Using Charge-Based Capacitance Measurement (PID-CBCM)”, Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 132-137, March 2015

2014 Udine, Italy

Karthik Balakrishnan, Keith Jenkins; "Circuits to Measure the Delay Variability of MOSFETs", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 127-134, 25-27th Mar 2014.

2013 Tokyo, Japan

T. Okagaki, T. Hasegawa, H. Takashino, M. Fujii, A. Tsuda, K. Shibutani, Y. Deguchi, M. Yokota, K. Onozawa;  "Tr Variance Evaluation induced by Probing Pressure and its Stress Extraction Methodology in 28nm High-K and Metal Gate Process", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp.203-206, March 2013.

2012 San Diego

C.C. McAndrew, M. Zunino, B. Braswell; "Self-Biasing and Self-Amplifying MOSFET Mismatch Test Structure", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 219-224, March 2012.

2011 Amsterdam

D. Perry, J. Cho, S. Domae, P. Asimakopoulos, A.Yakovlev4, P. Marchal, G. Van der Plas, N. Minas; "An Efficient Array Structure to Characterize the Impact of Through Silicon Vias on FET Devices", IEEE International Conference on Microelectronics Test Structures, pp. 118-122, April 2011.

2010 Hiroshima, Japan

M. Pfost, D. Costachescu, A. Podgaynaya, M. Stecher, S. Bychikhin, D. Pogany, E. Gornik; "Small embedded sensors for accurate temperature measurements in DMOS power transistor", IEEE International Conference on Microelectronics Test Structures, pp. 2-7, March 2010.

2009 Oxnard, CA, USA

Groenland, A.W., Wolters, R.A.M., Kovalgin, A.Y., Schmitz, J.; "Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films", IEEE International Conference on Microelectronics Test Structures, pp. 191-195, March 2009.

Steinbrueck, G., Vickers, J.S., Babazadeh, M., Pelella, M.M., Pakdaman, N.; "Non-Contact, Pad-less Measurement Technology and Test Structures for Characterization of Cross-Wafer and In-Die Product Variability", IEEE International Conference on Microelectronics Test Structures, pp. 131-136, March 2008.

2008 Edinburgh, Scotland

C. Hess, M. Squicciarini, S. Yu, J. Cheng, R. Lindley, A. Swimmer, S. Winters; “High Density Test Structure Array for Accurate Detection and Localization of Soft Fails”, IEEE International Conference on Microelectronics Test Structures, pp. 91-95, March 2008.

2007 Tokyo, Japan

M. Fujii, K. Nii, H. Makino, S. Ohbayashi, M. Igarashi, T. Kawamura, M. Yokota, N. Tsuda, T. Yoshizawa, T. Tsutsui, N. Takeshita, N. Murata, T. Tanaka, T. Fujiwara, K. Asahina, M. Okada, K. Tomita, M. Takeuchi, H. Shinohara; "A Large Scale, Flip-Flop RAM imitating a logic LSI for fast development of process technology", IEEE International Conference on Microelectronics Test Structures, pp. 131-134, March 2007.

2006 Austin, Texas, USA

M. Bhushan, M.B. Ketchen, S. Polonsky, A. Gattiker; "Ring Oscillator Based Technique for Measuring Variability Statistics", IEEE International Conference on Microelectronics Test Structures, pp. 87-92, March 2006.

2005 Leuven, Belgium

M. Ketchen, M. Bhushan, D. Pearson; "High Speed Test Structures for In-Line Process Monitoring and Model Calibration", IEEE International Conference on Microelectronics Test Structures, pp. 33-38, April 2005.

2004 Hyogo, Japan

J.G. Terry, S. Smith, A.J. Walton, A.M. Gundlach, J.T.M. Stevenson, A.B. Horsfall, K. Wang, J.M.M. dos Santos, S.M. Soare, N.G. Wright, A.G. O'Neill, S.J. Bull; "Test Chip for the Development and Evaluation of Test Structures for Measuring Stress in Metal Interconnect", IEEE International Conference on Microelectronic Test Structures, pp. 69-73, March 2004.

2003 Monterey, USA

R. Lefferts, C. Jakubiec; "An Integrated Test Chip for the Complete Characterization and Monitoring of a 0.25gm CMOS Technology that fits into Five Scribe Line Structures 150prn by 5,000pm", IEEE International Conference on Microelectronic Test Structures, pp. 59-63, March 2003.

2002 Cork, Ireland

H.P. Tuinhout, G. Hoogzaad, M Vertregt, R.L.J Roovers, C. Erdmann; "Design and Characterisation of a High Precision Resistor Ladder Test Structure", Proceedings of the IEEE International Conference on Microelectronic Test Structures, pp. 223-228, 8-11th April, 2002.

2001 Kobe, Japan

M. Funada, L. Matsuda, L. Ohzone, S. Odanaka, K. Yamashita, N. Koike, K. Tatsuuma; "A New Test Structure to Measure Precise Location of Hot-Carrier-lnduced Photoemission Peak from Gate Center of Subquarter-Micron n-MOSFETs", Proceedings of the IEEE International Conference on Microelectronic Test Structures, pp. 223-228, 19th - 22nd March 2001.

2000 Monterey, USA

H.P. Tuinhout; "Characterization of Systematic MOSFET Transconductance Mismatch", Proceedings of the IEEE International Conference on Microelectronic Test Structures, pp. 131-136, 13-16th March 2000.

U. Schaper, C. Linnenbank, R. Thewes; "A Novel Approach for Precise Characterization of Long Distance Mismatch of CMOS Devices", Proceedings of the IEEE International Conference on Microelectronic Test Structures, pp. 148-152, 13-16th March 2000.

1999 Goteborg, Sweden

O. Paul, L. Planner, H. Baltes; "A Thermal van der Pauw Test Structure", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 56-61, March 15-18, 1999.

1998 Kanazawa, Japan

Y. Manabe, K. Okuyama, K. Kubota, A. Nozoe, T. Karashima, K. Ujiie, H. Kanno, M. Nakashima, N. Ajika; "Detailed Observation of Small Leak Current in Flash Memories with Thin Tunnel Oxides", IEEE Procedings of International Conference on Microelectronic Test Structures, pp. 95-99, 23-26 March, 1998.

1997 Monterey, USA

H.P. Tuinhout, M. Vertregt; "Test Structures for Investigation of Metal Coverage Effects on MOSFET Matching", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 179-183, March 17-20, 1997.

1996 Trento, Italy

M. von Arx, O. Paul, H. Baltes; "Test Structures to Measure the Seebeck Coefficient of CMOS IC Polysilicon", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 117-122, March 25-28, 1996.

1995 Nara, Japan

T. Himeno, N. Matsukawa, H. Hazama, K. Sakui, M. Oshikiri, K. Masuda, K. Kanda, Y. Itoh, J. Miyamoto; "A New Technique for Measuring Threshold Voltage Distribution in Flash EEPROM Devices", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 283-287, March 22-25, 1995.

1994 San Diego, USA

E.S. Snyder, D.G. Pierce, D.V. Campbell, S.E. Swanson; "Self-Stressing Structures for Electromigration Testing to 500oC", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 62-67, March 22-25, 1994.

1993 Barcelona, Spain

R.A. Ashton, P.A. Layman, C.C. McAndrew; "Modeling and Characterization of MOSFET Width Dependencies", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 133-137, March 22-25, 1993.

1992 San Diego, USA

Y. Uraoka, T. Maeda, I. Miyanaga, K. Tsuji; "New failure analysis technique of ULSIs using photon emission method", Proceedings of the IEEE International Conference on Microelectronic Test Structures, pp. 100-5, 17-19 March, 1992.

R.A. Allen, M.W. Cresswell, C.H. Ellenwood, L.W. Linholm; "Voltage-dividing potentiometer enhancements for high-precision feature placement metrology", Proceedings of the IEEE International Conference on Microelectronic Test Structures, pp. 174-9, 17-19 March, 1992.

1991 Kyoto, Japan

Y. Kuroki, S. Hasegawa, T. Honda, Y. Iida; "X-ray Exposure Mask Accuracy Evaluation Using Electrical Test Structures", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 123-129, March 18-20, 1991.

M.W. Cresswell, M. Gaitan, R.A. Allen, L.W. Linholm; "A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 129-134, March 18-20, 1991.

1990 San Diego, USA

P.G. Mautry, J. Trager; "Investigation of Self-Heating In VLSI and ULSI MOSPETS", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 221-228, March 18-20, 1990.

C. Kortekaas; "On-Chip Quasi-Static Floating-Gate Capacitance Measurement Method", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 109-116, March 18-20, 1990.

1989 Edinburgh, UK

B.R. Blaes, M.G. Buehler; "Inverter Propagation Delay Measurements Using a Timing Sampler Circuit", Proceedings of IEEE International Conference on Microelectronic Test Structures, pp. 227-232, March 13-14, 1989