TUTORIAL OUTLINE

08:00 Registration

09:00     Introduction - Anthony Walton

09:05 1. Fundamentals of Microelectronic Test Structures - Anthony J. Walton,
             University of Edinburgh, Scotland, UK

o Tutorial Overiew
o Probe pad design
o The 2xN probe pad array
o Four-terminal Kelvin measurement technique
o Bridge/cross resistors for sheet and linewidth measurements
o Design curves for linewidth measurements
o Three-terminal capacitor measurements
o Matrixed test structures

Introduction/background
o Optical structures
o Electrical structures
o Metrology comparisons
o Recent advances

10.30 COFFEE BREAK

11.00 3. DC-type Transistor Model Parameter Extraction - Colin McAndrew,
             Motorola, Tempe, Arizona

o Compact modelling foundation: Process and geometry dependence
o BJT modelling review (VBIC emphasis)
o MOS modelling review (Tsividis charge sheet model emphasis)
o Common MOS modelling problems, their consequences, and how to detect them
o Model parameters versus "physical" parameters
o Direct extraction versus optimization
o The importance of using the right target data and residual metric
o Extraction tricks and targets for BJT characterization, the substrate current goldmine
o Generic iterative optimization strategy for MOS characterization

11.45 4. High Frequency Parameter Extraction - Franz Sischka
             Hewlett Packard, Germany

o Basics of S-Parameters
o High Frequency Measurement Techniques
     - Network Analyzer Calibration
     - Probes and Device Layout
o Introduction to De-Embedding (off-stripping) of parasitic components
o HF Transistor Parameter Extractions
     - Large Signal Model
     - Small Signal Model
o Introduction to Package Modelling

12:30 HOSTED LUNCH

13.45 5. High Frequency Noise Measurements and Modelling - Jamal Deen,
             Simon Fraser University, Vancouver, Canada

o Test structures for HF measurements
o Scattering and Noise Parameter Measuremnents
     - entire system setup
     - system settings
     - system calibration
o Noise in Semiconductor Devices
o Review of Noise Models of MOSFETs
o Noise Modeling and Experiments
     - Theory of Noisy Two-Ports
     - Noise Parameter De-Embedding and Pad Modeling
     - Modeling and Experimental Results

14.30 6. Characterising CMOS Technologies for ESD Robustness - Robert Ashton,
             Bell Labs, Lucent Technologies, - , USA

o Introduction to ElectroStatic Discharge (ESD)
o ESD testing of Integrated Circuits (HBM,MM,CDM)
o Basics of ESD Protection Circuitry
     -Circuit Elements to be protected
     -Circuit Elements used for protection
o Understanding Circuit Elements outside of Normal Operation
     -Transmission Line Pulse Measurement (TLP)
     -Test Structures for ESD Characterization
     -SEMATECH Structures for ESD Robustness

15.15 COFFEE BREAK

15.45 7. Extraction of Statistically Valid Model Parameters for IC Design - Kevin McCarthy,
             NMRC, Cork, Ireland

o Introduction - the need for statistical methods in parameter extraction.
o Literature Review - a brief look at some methods used in the past.
o Multivariate Statistical Methods - especially Principal Component Analysis which is widely used at present.
o Design of Experiments - factorial design techniques which can be used to explore the boundaries of the parameter distributions.
o Some Examples

16.30 8. Matching - Hans Tuinhout,
             Philips Research Laboratories, Eindhoven, The Netherlands

o Introduction and motivation
o Mismatch effects
o Measurement methods
o Test structures
  - Rules
  - Examples
o Modeling and matching numbers

19.00-21.00 RECEPTION
 
 

INSTRUCTORS

Anthony J. Walton, Univ. of Edinburgh, Scotland, UK

Anthony J. Walton has been a member of the Electrical Engineering Department at the University of Edinburgh for the past 15 years. During that time he has been involved with the microelectronics industry in a number of areas which include silicon processing, yield improvement, Design for Manufacturability (DFM), Technology Computer Aided Design (TCAD) and microelectronic test structures. His present interests also include the optimisation of semiconductor processes through the integration of experimental design and TCAD simulation tools. He has published widely and in 1990 won the best paper award for the IEEE Transactions on Semiconductor Manufacturing.

Loren W. Linholm, NIST, Gaithersburg, Maryland, USA

Loren Linholm received the B.S. in Electrical Engineering from the University of California, Berkeley in 1968 and the M.S. In Electrical Engineering from the University of Maryland, College Park in 1973. Loren has been employed by the Naval Missile Center, Point Mugu, CA, the Department of Defence, Ft. Meade, MD, and since 1978, by the Semiconductor Electronics Division at the National Institute of Standards and Technology, Gaithersburg, MD. Loren currently heads the Integrated Circuits Technology Group which is responsible for designing, developing, and evaluating measurement methods for silicon integrated circuits with emphasis on test structures, associated data analysis techniques, novel sensors, and advanced microelectromechanical systems. Loren is a member of the IEEE Electron Devices Society and co- founder of the International Conference on Microelectronic Test Structures.

Colin McAndrew, Motorola, Tempe, Arizona

Colin McAndrew received the Ph.D. and M.A.Sc. degrees in Systems Design Engineering from the University of Waterloo, Waterloo, Ontario, Canada, in 1984 and 1982 respectively, and the B.E. degree in Electrical Engineering from Monash University, Melbourne, Victoria, Australia, in 1978. Since 1995 he has been with Motorola, Tempe AZ, and is at present the Manager of the Modeling Technology Laboratory. From 1987 to 1995 he was at AT&T Bell Laboratories, Allentown PA. His work is primarily on compact and statistical modelling and characterization for circuit simulation.

Franz Sischka, Hewlett Packard, Germany

Franz Sischka studied communications engineering at the University of Stuttgart, Germany, where he also received his M.S. (Diplom-Ingenieur) and the Ph.D. degrees in 1979 and 1984. After joining Hewlett-Packard in Germany, he worked for 5 years in R&D in the fiber optics group at HP Boeblingen and was co-developer of HP's first optical time domain reflectometer (OTDR) for glass fiber characterization. Since 1989, he has been a consultant for HP's device modelling software IC-CAP and author of the IC-CAP modelling handbook. His work is specially focusing on high frequency device modelling and model parameter extraction strategies.

Jamal Deen, Simon Fraser University, Vancouver, Canada

Dr. M. Jamal Deen is professor of Engineering Science at Simon Fraser University, Vancouver, British Columbia, Canada. Previously, he was with the CNRS Laboratory of Physics of Semiconductors Devices (LPCS), Grenoble (summer 1998), Faculty of Electrical Engineering (ECTM Lab), Delft University of Technology (Visiting Professor, summer 1997); Herzberg Institute of Astrophysics, National Research Council, Ottawa (Visiting Scientist, summer 1986); and Lehigh University, Bethlehem, Pennsylvania (Assistant Professor, 1985-86). His industrial experience includes a one-year visiting scientist position (1992-93) with the Device Technology Group, Northern Telecom, Ottawa, and several years of consulting and joint research with Mitel, Northern Telecom, Bell Northern Research, Nanowave Technology, National Semiconductor and Rockwell Semiconductor Systems. His present research interests are in silicon device physics and modelling, high frequency devices, optical detectors and novel semiconductor materials.

Robert Ashton, Bell Labs, Lucent Technologies, - , USA

Robert Ashton received his B.S. and Ph.D. degrees in Physics from the University of Rhode Island in 1971 and 1977. After doing post doctoral positions in low temperature physics at Rutgers University and Ohio State University he joined AT&T Bell Laboratories in 1980. At AT&T Bell Labs and now at Bell Labs, Lucent Technologies, which spun off from AT&T in 1996, he has been a Member of Technical Staff in the VLSI Technology Laboratory. He has been involved in technology integration for core CMOS technologies, test structure design for technology development, and the technology issues of ElectroStatic Discharge (ESD). He is a member of the IEEE Electron Device Society, the ESD Association and the SEMATECH ESD Working Group. He has been a member of the ICMTS Technical Committee since 1990 and served as Technical Chairman in 1994 and as General Chairman in 1997.

Kevin McCarthy, NMRC, Cork, Ireland

Kevin McCarthy received the B.E., M.Eng.Sc.and Ph.D. degrees from University College Cork, Ireland in 1982, 1986 and 1992 respectively. From 1982 to 1984 and again from 1990 to 1993 he worked with Analog Devices, Limerick, Ireland in the Product Engineering and CAD departments. He has been with the National Microelectronics Research Centre, Ireland since 1993 where he is now a Senior Research Scientist. His research interests are in compact device modelling for CMOS and bipolar devices and the use of these models for statistical analysis. He has participated in the simulation aspects of European Union technology development projects such as JLP, ADEQUAT and ACE and is a member of the IEEE Electron Devices Society.

Hans Tuinhout, Philips Research Laboratories, Eindhoven, The Netherlands

Hans Tuinhout received his MSEE degree from the University of Technology of Delft (NL), in 1980. Since then Hans worked at Philips Research Laboratories in Eindhoven (NL), interrupted by a sabbatical year at the ECE Department of Carnegie-Mellon University, Pittsburgh, Pennsylvania. During his professional career, Hans has always been involved with device characterization for CMOS and BiCMOS processes. Currently Hans works as Senior Scientist in the Semiconductor Device Architectures group at Philips Research. His research activities are focused on very accurate DC device measurements for matching characterization. Hans is a member of the IEEE Electron Devices Society and member of the ICMTS Technical Program Committee. He served as Technical Program Chairman for the ICMTS 1989. Hans is a part-time instructor for the Philips Centre for Technical Training where he teaches IC-technology and Bipolar and MOS device characterization.
 
 

Technical Session Information

The technical session will be held in the conference hall "Västerhavet" on the ground floor.

The official language of the conference is English and it will be used for all presentations, printed materials, slides and OHP transparencies. A overhead projector and 35mm slide projector for 50mm x 50mm mount will be available for use at the presentation. All speakers are requested to report to the speaker's registration desk located in front of the conference room to arrange their slides in the carousels and preview them.

One of the papers presented at the conference will be selected for the Best Paper Award. The award will be presented at the award ceremony during ICMTS 2000.

The IEEE ICMTS 1999 will publish a proceedings. One copy of the proceedings is included in the registration fee. Additional copies will be available during the conference for 600 SEK per copy, or from the IEEE after the conference.

Poster presentation, Vendor presentation and Equipment Exhibition

A poster session will be held Tuesday at 15.40 at which time authors will give a brief 5-minute summary of their work. Posters will be displayed from Tuesday at 13.00 until Wedneysday at 19.00. Following the poster presentation a 5-minut oral presentation will be given by the exhibitors on Tuesday at 16.30.

Following these presentations a combined poster session and measurement equipment exhibition is arranged. The equipment exhibition will display equipment closely paralleling the nature of this meeting. This permit one-on-one discussions between exhibitors and conference attendees on the latest test equipment.

Equipment exhibition hours

Food and Beverages Functions

Registration welcome reception

A wine and cheese get-together reception will be held on Monday at 19-21 in the Sheraton lobby.

Lunch

Lunch will be served on Monday (for those attending the tutorial short course), Tuesday and Wedneysday at the Sheraton Hotel.

Banquet

The Conference Banquet will be held Wedneysday March 17, at the Sheraton Hotel. One banquet ticket is included with the technical session registration. Additional guest tickets are available at the cost of SEK 450.

Göteborg Information

The city of Göteborg is located on the west-coast of southern Sweden. Göteborg is the second largest city of Sweden with a population of almost 500,000. The city was founded in 1621 by king Gustav II Adolf, the king who also built the big battle-ship Vasa, the world´s oldest battle ship from 1628 which can be seen in at the Vasa museum in Stockholm. Göteborg has the largest port in Sweden with 20% of all Swedish export and import going through this harbor. Göteborg is also the home town of Volvo, with a major part of their family cars and trucks being manufactured here. Other well-known companies in the region are Ericsson who has its microwave activities here and Hasselblad, the well-known camera manufacturer. Göteborg is also a university city, hosting both the University of Göteborg and Chalmers Technical University. Göteborg has also a national Symphony Orchestra and the new opera house has become a new landmark of the city.

Climate and Clothing

The weather in Göteborg during the conference period is often unpredictable. March is often associated with noon-day thaw: we are leaving winter behind, days are getting longer and spring is not faraway. Most winters there is not much snow at all in Göteborg, close as it is to the sea, and if there is most of it is usually gone by March.

The  temperature will range between -5^oC (23^oF) and +5^oC (41^oF), usually with a few plus degrees during the day and a few minus degrees during the night. Warm clothing is recommended. Bring your longjohns if you want to make long outdoor walks. Walks or jogging in the Skatås/Delsjön forest park is strongly recommended.

Hotels and buildings are fully heated and air-conditioned.

Excursion - BOAT TRIP with "ÄRTOR & PUNSCH"

What a perfect conclusion of the conference! At 13.00 we leave the Lilla Bommen ferry terminal with Älvsnabben, a commuter ferry regularly cruising the Göteborg Harbor. After an exciting trip through the wintry harbor, where big ferries and speedy catamarans regularly leave for Denmark, we arrive at the Eriksberg docklands (a former shipyard). At the exclusive restaurant of Westra Piren we will have ärtor and punsch (Swedish pea-soup with warm Swedish punch) and Swedish pancakes for dessert. An old Swedish tradition, only available on Thursdays! An excellent choice on a chilly day!

General Chairman:
Kjell O. Jeppson
Chalmers University of Technology
Dept. of Solid-State Electronics
S-41296 Göteborg, Sweden
Phone: +46-31-772 1856, Fax: +46-31-772 3622
e-mail: kjell.jeppson@ic.chalmers.se

Technical Chairman:
Alan Mathewson
NMRC
University College
Lee Maltings, Prospect Row
Cork, Ireland
Phone: +353-21-904 142, Fax: +353-21-904 204
e-mail: amathews@nmrc.ucc.ie

Tutorial Chairman:
Anthony J. Walton
Electrical Engineering Department
University of Edinburgh
Kings Bldg. , Edinburgh, EH9 3JL, UK
Phone: +44-131-650-5620, Fax: +44-131-650-6554
e-mail: Anthony.Walton@ee.ed.ac.uk

Tutorial Co-chairman:
Hans Tuinhout
Philips Research Laboratories
Semiconductor Device Architecture Group
Prof. Holstlaan 4 (WAG 11)
5656 AA Eindhoven, The Netherlands
Phone: +31-40-274 2214
Fax +31-40-274 3390
e-mail: tuinhout@natlab.research.philips.com

Equipment Exhibit Chairman:
Gerard Ghibaudo
LPCS/ENSERG
23 Avenue des martyrs, BP 257
38016 Grenoble Cedex-FRANCE
Phone: +33-(0)4-7685-6058, Fax:+33-(0)4-7685-6070
e-mail: ghibaudo@enserg.fr

USA Representative:
Loren W. Linholm
National Inst. of Standards & Technology
B-360 Tech. Bldg.
Gaithersburg, MD 20899, USA
Phone: +1-301-975-2052, Fax: +1-301-948-4081
e-mail: linholm@piper.eeel.nist.gov

Asian Representative:
Takashi Ohzone
Toyama Prefectural University
Kurokawa, Kosugi-Machi
Imizu-Gun,Toyama 939-03, Japan
Phone: +81-776-56-7500 Ext. 501, Fax: +81-766-56-6172
e-mail: ohzone@pu-toyama.ac.jp

ICMTS 1999 Conference Secretariat:
Ivan Ring Nielsen
Technoconsult
Dortheavej 7
DK-2400 Copenhagen NV, Denmark
Phone: +45-38-880 600, Fax: +45-38-880 611
e-mail: technoconsult@technodata.dk