| March 17 - 20, 1997 |
| DOUBLETREE HOTEL AT |
| FISHERMAN'S WHARF |
| MONTEREY, CALIFORNIA |
Sponsored by IEEE Electron Devices Society
Dear Colleague,
On behalf of the Committee I would like to invite you to the 1997 International Conference on Microelectronic Test Structures. The Conference is sponsored by the IEEE Electron Devices Society and will bring together designers and users of test chips from all over the world to discuss recent developments and future directions regarding the design, measurement, and application of microelectronic test structures. This is the 10th time for ICMTS as an international conference. Before 1988 the Conference met on an every other year basis as a workshop. The Conference has been able to maintain the friendliness of a workshop by providing ample social activities to ensure that participants get the chance to meet others in their field and learn from each other's experiences.
This year's conference consists of 48 papers in 9 sessions including a poster session with 14 papers. The sessions include topics on parameter extraction, device and process characterization, reliability, dimensional measurement, and yield. Authors of the poster session will present an oral summary of their work to the general audience. There will also be an equipment exhibit. In addition to the displays of equipment, each of the exhibitors will have the opportunity to give a short presentation describing their latest products. A reception will follow the equipment exhibitor's presentation.
On Monday, March 17, preceding the Conference a short course tutorial will be held to overview the main topics comprising the field of microelectronic test structures. A wine and cheese get-together will be held following the tutorial. The Conference banquet will be held on Wednesday evening in the Monterey Bay Aquarium. The Monterey Bay Aquarium is a world-class aquarium which features the plants and animals of Monterey Bay. The aquarium has opened a major addition within the last year specializing in the nearby deep ocean.
The Conference will be held at the DoubleTree Hotel just across the street from Fisherman's Wharf in the center of Monterey. Both the DoubleTree Hotel and the charming town of Monterey will provide an excellent site for a very rewarding technical experience.
Sincerely,
Robert Ashton
General Chairman
The 1997 IEEE ICMTS will be held at the DoubleTree Hotel at Fisherman's Wharf in Monterey, California. The Conference headquarters hotel will provide guest accommodations as well as meeting facilities for all attendees. The technical program, which will consist of nine sessions of contributed papers and a poster session, will be held March 18 through 20. A short course entitled "An Introduction to the Design, Measurement, and Analysis of Microelectronic Test Structures" will be offered on March 17.
Preregistration is encouraged. To preregister, use registration form in this booklet. Please fill out all spaces completely. Note that the fees are higher for registration forms received after January 15, 1997. You may mail your registration form with a check drawn on a US bank in US funds only. To fax your registration form, you must include credit card information, and the 5% processing fees for all credit card transactions. To e-mail your registration and pay by credit card, a fax with your signature authorizing All About Meetings, Inc. to charge your credit card for registration fees must also be forwarded.
Mail your conference registration form and remittance to:
| 1997 IEEE ICMTS CONFERENCE |
| C/o ALL ABOUT MEETINGS, INC. |
| 1650 S. Pacific Coast Hwy., Suite 209 |
| Redondo Beach, CA 90277 |
| (310) 316-5153 - Telephone |
| (310) 316-0713 - Fax |
| 70541.1225@Compuserve.com - e-mail |
Call the above telephone number for registration information only. Telephone registrations will not be accepted. Registrations should be mailed no later than March 3, 1997, or arrangements should be made to hand carry fees to on-site registration.
Payment for fees at the Conference must be in US funds and by check drawn on a US bank, cash, US dollars traveler's checks, or one of the following credit cards: American Express, Visa, or MasterCard.
Due to advance financial commitments, refunds of registration fees requested after March 1, 1997 cannot be guaranteed. A $25.00 processing fee will be withheld from all refunds. Consideration of requests for refunds will be processed after the Conference.
On-site registration for the Conference will be conducted in the DoubleTree Hotel's De Anza Foyer as scheduled:
| Sunday, | March 16 | 6:00pm - 8:00pm |
| Monday, | March 17 | 7:00am - 5:00pm |
| 7:00pm - 9:00pm | ||
| Tuesday, | March 18 | 7:30am - 5:00pm |
| Wednesday, | March 19 | 7:30am - 4:00pm |
| Thursday, | March 20 | 7:30am - 12:30pm |
Registration fee includes admittance to the Technical sessions, continental breakfast on Tuesday, Wednesday, and Thursday, Exhibit Reception Tuesday at 5:30pm, banquet at the Monterey Bay Aquarium on Wednesday at 7:00pm, Lunch Tuesday and Wednesday, one copy of the proceedings, and admittance to the exhibits.
The DoubleTree Hotel at Fisherman's Wharf is a complete resort hotel located in the heart of Monterey and has 374 guest rooms, many with spectacular bay views. Dining is available in the California Grill from 6:00am to 10:00pm and is open for breakfast, lunch, and dinner. In addition, the Lobby Lounge features wide screen TV and Peter B.'s Pub. Room service is available from 6:00am to 11:00pm. It is located in downtown Monterey, which has many resturants, coffee shops, and stores and is within walking distance of Fisherman's Wharf.
Reservations can be made by completing the Hotel Registration Form. Fill out the appropriate section of this form and mail it to the DoubleTree Hotel at Fisherman's Wharf. Hotel reservations can also be made by calling the hotel or faxing your registration form.
| DoubleTree Hotel at Fisherman's Wharf |
| 2 Portola Plaza |
| Monterey, CA 93940 |
| (408) 649-4511 Hotel Telephone |
| (408) 649-3109 Hotel Reservation Fax |
| (800) 222- TREE (8733) Reservations Toll Free |
The hotel cut-off date for ICMTS's group reservations is February 15, 1997. After February 15, hotel accommodations will be available on a space-available basis only, at the regular, higher rate. March is a busy time in Monterey; therefore, you are urged to make reservations as soon as possible. The group rate is $110.00 per day.
Parking is available, Valet is $11.00 per day, and self parking is $9.00 per day. There is public parking available at a nominal charge located one block from the hotel.
By Air: Monterey Peninsula Airport is served by American Eagle, United, United Express, Skywest/Delta, Alaska, Continental, and Northwest Airlines. There are more than 100 arrivals and departures daily to and from San Francisco, San Jose, and Los Angeles, with connections to all domestic and international locations. The distance from the airport to the DoubleTree is approximately four miles.
By Car: The drive from San Jose is approximately 60 miles; San Francisco is approximately 120 miles.
Airport/Ground Transportation: Taxi service is recommended. The cost is approximately $10.00.
The following rental car agencies are located at the Monterey Airport: Avis, Budget, Dollar, Hertz, National, and Thrifty.
Messages can be left for attendees during registration and will be posted on the message board. Call the hotel direct (408) 649-4511 and ask for IEEE registration. Messages for attendees who are hotel guests can also be left for the individual in their room, or you may forward a fax to a hotel guest at the guest fax number which is 1-408-372-0620.
Monterey enjoys a unique weather pattern, with coastal temperatures averaging 57 degrees year-round. The average maximum temperature in March is 62 degrees, and average minimum temperature is 45 degrees. It is advisable to bring a sweater, jacket, or coat.
Monterey Bay Aquarium - This fascinating, internationally acclaimed aquarium focuses on educating visitors about the mysteries and wonders of the Monterey Bay. Conference attendees will be able to purchase tickets to the Aquarium at a discount if they wish to return on Thursday after the banquet.
Big Sur - A 90-mile stretch of coastline that begins in Monterey County a few miles south of Carmel and ends in San Luis Obispo County at San Simeon (Hearst Castle).
Cannery Row - An historic area of the city of Monterey, located on the Bay between the Coast Guard wharf and the Pacific Ocean border.
Carmel-by-the-Sea* - A village in a forest setting located above a breathtaking white-sand beach 5 miles south of Monterey and 26 miles north of Big Sur just off Highway One.
Carmel Valley - Twelve miles due east of Carmel-by-the-Sea.
Fisherman's Wharf & Wharf II - Located on Monterey Bay, in the historic heart of Monterey, off of Del Monte Avenue.
Pebble Beach* - On the southern tip of the Monterey Peninsula, due west of Monterey and due north of Carmel-by-the-Sea.
Hearst Castle - A California State Historical Monument containing 165 beautifully furnished rooms, a huge collection of art and antiques, impressive swimming pools, gardens, and terraces. Located 90 miles south of Monterey.
*See Tour for more information
What a perfect conclusion to the Conference. A new feature this year will be a tour of Monterey's Seventeen Mile Drive (Pebble Beach), a must see, and famous Carmel. The bus will depart at 1:30pm and return at 5:30pm. Don't forget your camera. The tour is limited to 47 passengers, so sign up early to avoid disappointment.
| Tour: Seventeen Mile Drive and Carmel by the Sea |
| Cost: $35.00 per person |
Located in the Del Monte Forest, the 17-Mile Drive winds through groves of Monterey pine and Monterey cypress and along a spectacular coastline populated by seals, sea lions, and sea otters. Guests will view castle-like mansions, championship golf courses, and enjoy one of the most beautiful residential areas in the world. Stops will be made for photo opportunities. After the 17-Mile Drive we'll continue to Carmel-by-the-Sea.
The one-square-mile hamlet is a charming collection of flower-bower cottages and regal residences set in the heart of a pine forest on the edge of the Pacific Ocean. The village is full of unique shops featuring an extraordinary range of treasures. Guests will browse an array of fascinating clothing in Carmel's unique and sophisticated boutiques. In the peninsula's "art colony", they will discover the hidden treasures tucked away in its nooks and crannies. They will visit the ever-changing exhibits of rare, museum-quality hand-blown glass, fine woodworkings, original graphics, and watercolors. Guests will shop in Carmel for approximately one and one half hours.
This tour will be narrated, so the many points of interest will not be overlooked.
The technical session will be held in Rooms DeAnza II and III.
The poster session will be held Wednesday at 2:40 pm, at which time authors will give a brief 5 minute talk describing their poster in De Anza II and III. The general session will then move to De Anza I where authors will be available at their posters for questions and discussion.
Posters will be displayed from Tuesday at 1:00pm until Thursday at 12:00 noon.
ICMTS vendor exhibits will be displyed in De Anza Ballroom I, on Tuesday, March 18, from 1:00pm, and will remain on display until noon on Thursday, March 20.
A five minute oral presentation will be held in De Anza II & III at 4:40 pm on Tuesday, March 18, 1997.
For information and an application to exhibit at the 1997 ICMTS, please contact Jim Reedholm, or Karen Kinton at Reedholm Instruments, (512) 869-1935. As of November 20, 1996, the following exhibitors have reserved exhibit space:
| Sandia National Laboratories |
| Cascade Microtech |
| Hewlett Packard |
| QualiTau Incorporated |
| Lucas/Signatone Corp. |
| Reedholm Instruments |
The Welcome Reception will be held on Monday, March 17 from 7:00pm to 9:00pm in the De Anza Foyer and De Anza I. Wine and cheese will be served.
Continental breakfast will be served on Monday, March 17 from 7:00am-8:30am, and on Tuesday, Wednesday, and Thursday, March 18-20 from 7:30am-8:30am, in the De Anza Foyer (outside the exhibit area). The coffee breaks will also be held in the De Anza Foyer.
Lunch will be served on Monday, Tuesday, and an Awards Luncheon on Wednesday, March 17-19, in the Bonsai Ballroom.
The Reception will be held on Tuesday, March 18 at 5:30pm in the De Anza Foyer and De Anza I.
The Conference Banquet will be held on Wednesday, March 19 at the Monterey Bay Aquarium. Round trip bus transportation will be provided. Buses will depart from the front of the hotel starting at 6:00pm. Attendees can visit the exhibits from 7:00pm-8:00pm, at which time dinner will be served. In addition, there will be time to walk through the aquarium after dinner until 11:00pm.
One banquet ticket is included with one Technical Session Registration. Additional guest tickets are available at the cost of $55.00.
An Introduction to the Design, Measurement, and Analysis of Microelectronic Test Structures
The ICMTS Tutorial is a one-day short course intended to provide the non-expert with the fundamentals associated with microelectronic test structures. The course strives to provide good design, test, and analysis guidelines so that superior test-structure practice will be followed, thus paving the way for improved process control, higher product yield, and rapid product introduction. The course instructors, chosen by Dr. Buehler for this year's tutorial, have many years of experience in the field of test structure design, test, and analysis. The format will be interactive with emphasis on the practical use of microelectronic test structures.
| 7:30am | Registration | Continental Breakfast |
| 8:25am | WELCOME | Robert Ashton, Lucent Technologies, USA |
| 8:30am | INTRODUCTION | Test Structure Fundamentals |
| Martin Buehler, JPL, USA | ||
| 9:15am | ALIGNMENT | Overlay, Registration, and Feature |
| Placement Structures | ||
| Richard Allen, NIST, USA | ||
| 10:00am | Break | |
| 10:30am | YIELD | Concepts in Yield Management |
| Akella Satya, IBM Corporation, USA | ||
| 11:15am | RELIABILITY | Wafer-Level Reliability Testing |
| Tim Turner, Keithley Instruments, USA | ||
| 12:00pm | Hosted Lunch | |
| 1:15pm | FEMTO | Low Current Measurement Techniques |
| Satoshi Habu, Hewlett Packard, Japan | ||
| 2:00pm | MATCHING | Transistor Characterization |
| Hans Tuinhout, Philips Research Labs., The Netherlands | ||
| 2:45pm | Break | |
| 3:15pm | MEMS | Structures for Electromechanical |
| Devices | ||
| Robert Puers, Katholieke Universiteit Leuven, Belgium | ||
| 4:00pm | PROCESS | Worst Case Parameter Methodology |
| CORNERING | ||
| Ellen Piccioli, Digital, USA | ||
| 4:45pm | Wrap-up |
1. INTRODUCTION - Test Structure Fundamentals:
Martin Buehler, JPL, Chair
Richard Allen, NIST, Instructor
Akella Satya, IBM, Instructor
Tim Turner, Keithley, Instructor
Satoshi Habu, HP, Japan, Instructor
Hans Tuinhout, Philips Research Labs, Instructor
Robert Puers, Katholieke Universiteit Leuven, Instructor
Ellen Piccioli, DEC, Instructor
Chairman, California Institute of Technology
Martin Buehler received his BSEE and MSEE from Duke University in 1961 and 1963, respectively, and his Ph.D. in EE from Stanford University in 1966, with the specialization in Solid State Electronics. He worked at TI and NBS (now NIST), and since 1981 has been with the Jet Propulsion Laboratory where he is a Senior Research Scientist in the Microdevices Laboratory. He was principal investigator for the Clementine RRELAX (Radiation and Reliability Assurance Experiment) and the Mars '96 MAPEX (Microelectronic and Photonic Exposure Experiment) and provided total radiation dosimetry for the Space Technology Research Vehicle spacecrafts and Telstar and Intelsat communication satellites. Currently, he is the co-lead for In situ Instruments and MEMS in the New Millennium Program. He has authored over 70 papers and holds seven patents on novel microelectronic devices and test structures. He is co-founder of the IEEE ICMTS and has served as its General Chairman, Technical Chairman and Finance Chairman. Martin is a member of the IEEE Electron Devices Society and the Nuclear Science Society.
National Institute of Standards and Technology
Richard Allen received his B.S. and M.S. degrees in Physics from Rensselaer Polytechnic Institute, Troy, New York, in 1982 and 1984, respectively. From 1984-1989 he was with the VLSI Technology Group at the Jet Propulsion Laboratory, Pasadena, California. At JPL he developed test structures for in-situ monitoring of space radiation effects on VLSI devices and circuits. From 1989-1990 he was with College Park Software in Altadena, California, an AI development company specializing in LISP-based expert systems tools. Since June 1990 he has been with the Integrated Circuits Technology Group of the National Institute of Standards and Technology in Gaithersburg, Maryland. His present interests include developing electrical test structures for submicrometer metrology of VLSI devices. Mr. Allen is a member of the American Physical Society and the IEEE.
IBM Corporation
Akella Satya received his B. Tech. (Hons) and M.Tech. (Metal Physics) degrees from the Indian Institute of Technology, Kharagpur, India, where he served as an Associate Lecturer through 1962. He was the chief metallurgist at the Midwest Machine Co., Marysville, Michigan through 1966, received the Ph.D. in Materials Science from the Michigan State University in 1969, then joined the IBM Corporation as a Staff Engineer and is now retired. Dr. Satya's contributions are in process development, device, design, and yield management and used in sub-0.5um CMOS Fab. Dr. Satya is a member of Sigma Xi, IEEE, ASM, ECS, and a Founder-Life-Member of the Indian Society for the Advancement of Materials and Process Engineering. He holds several patents, authored many papers, and served as a mentor for SRC/Canegie-Mellon University on yield modeling. He has been a member of the Technical Program Committee of IEEE ICMTS.
Keithley Instruments
Timothy Turner has more than 23 years of experience in the field of semiconductor reliability. He has worked for semiconductor manufacturers such as Mostek Corporation and SGS-Thomson. For the past 10 years he has owned Turner Engineering Technology (TET), a consulting company specializing in the field of Wafer Level Reliability Testing. Mr. Turner is now Director of Test Structures for Keithley Instruments following their acquisition of TET in 1996. Mr. Turner has published many papers in the field of Wafer Level Reliability Testing and semiconductor reliability. He has several patents on semiconductor processing techniques and has lectured on this topic through the UCLA extension center.
Hewlett-Packard, Japan
Satoshi Habu received his B.S. and M.S. degree in Electrical Engineering from Ibaraki University in 1981 and 1983, respectively. In 1983 he joined Hewlett-Packard Japan, Ltd. as R&D engineer. He has been responsible for developing instruments for semiconductor parameter measurements. He is currently heading projects which develop instrumentation for wafer level testing.
Philips Research
Hans Tuinhout received his MSEE degree from the University of Technology of Delft (NL), in 1980. Since then Hans worked at Philips Research Laboratories in Eindhoven (NL), interrupted by a sabbatical year at the ECE Department of Carnegie-Mellon University, Pittsburgh, Pennsylvania. During his professional career, Hans has always been involved with device characterization for CMOS and BiCMOS processes. Currently Hans works as Senior Scientist in the Semiconductor Device Architectures group at Philips Research. His research activities are focused on very accurate DC device measurements for matching characterization. Hans is a member of the IEEE Electron Devices Society and member of the ICMTS Technical Program Committee. He served as Technical Program Chairman for the ICMTS 1989. Hans is a part-time instructor for the Philips Centre for Technical Training where he teaches IC-technology and Bipolar and MOS device characterization.
Katholieke Universiteit Leuven
Robert Puers recieved his B.S. degree in electrical engineering in Ghent in 1974, and his M.S. degree at the Katholieke Universiteit Leuven in 1977, where he obtained his Ph.D. in 1986. He is Professor at the Katholieke Universiteit Leuven, Belgium, and is director of the clean room facilities for silicon wafer processing and for hybrid circuit technology at the ESAT-MICAS laboratories. Since 1987 he established a group working on mechanical sensors and silicon micromachining, and on packaging techniques, for biomedical implant systems as well as for high performance industrial devices. In addition, his general interest is in low power telemetry systems, with the emphasis on intelligent interface circuits and inductive power and data links. He is involved in the organization, reviewing, and publishing activities of many conferences, journals, and workshops in the field of biotelemetry, sensors, actuators, micromachining, and microsystems. Professor Puers is teaching courses in 'Production Techniques for Electronic Circuit Manufacturing,' and in 'Biomedical Instrumentation and Stimulation.' He is the author of more then 130 papers on biotelemetry, sensors, or packaging in journals or international conferences. He is a senior member of the IEEE, council member of the International Society on Biotelemetry, and member of the International Society for Hybrid Microelectronics and the Electron Device Society.
Digital Equipment Corporation
Ellen Grant Piccioli received her B.S. in Electrical Engineering from Cornell University in 1986, and the M.S. in Electrical Engineering from the University of Michigan in 1991. After working at Digital Equipment Corporation from 1986 to 1989 as a Yield Enhancement Engineer, Ellen received a fellowship from Digital to pursue a graduate education. Ellen returned to Digital's Advanced Semiconductor Development Group as a Device Engineer from 1991 to 1994. Currently, Ellen is the team leader of the Test Chip Group in the CMOS Process Integration area at Digital Semiconductor. Ellen is a member of IEEE and SWE.
The technical program consists of 34 oral and 14 poster papers. The Technical Sessions and Session Chairs are:
Kjell Jeppson, Co-Chair, Al Ipri, Co-Chair
Emilio Lora-Tamayo, Co-Chair Akella Satya, Co-Chair
Hans Tuinhout, Co-Chair, Yoichi Tamaki, Co-Chair
Loren Linholm, Co-Chair, Edward Hakim, Co-Chair
Yoshiaki Hagiwara, Co-Chair, Michael Cresswell, Co-Chair
Dieter Schroeder, Co-Chair, Martin Buehler, Co-Chair
Anthony Walton, Co-Chair, Takashi Ohzone, Co-Chair
Lawrence Bair, Co-Chair, Gerard Ghibaudo, Co-Chair
Giovanni Soncini, Co-Chair, Alfred Papp, Co-Chair
| 7:00 - 9:00 PM | REGISTRATION RECEPTION |
| 7:00am | CONTINENTAL BREAKFAST |
| 7:30am | REGISTRATION |
| 8:50am | WELCOME |
| Robert Ashton, General Chair | |
| Larry Bair, Technical Program Chair | |
| Loren Linholm, Local Arrangements Chair |
Co-Chairs: Kjell Jeppson, Chalmers University of Technology, Sweden and Al Ipri, David Sarnoff Research Center, USA
Co-Chairs: Emilio Lora-Tamayo, Campus Universidad Autonoma de Barcelona, Spain and Akella Satya, IBM Corporation, USA
Co-Chairs: Hans Tuinhout, Philips Research, Netherlands and Yoichi Tamaki, Hitachi Corporation, Japan
Co-Chairs: Loren Linholm, National Institute of Standards & Technology, USA and Edward Hakim, US Army LABCOM, USA
Co-Chairs: Yoshiaki Hagiwara, Sony Corporation, Japan and Michael Cresswell, National Institute of Standards & Technology, USA
Co-Chairs: Dieter Schroeder, Arizona State University, USA and Martin Buehler, Jet Propulsion Laboratory, USA
Co-Chairs: Anthony Walton, University of Edinburgh, UK and Takashi Ohzone, Toyama Prefectural University, Japan
Co-Chairs: Lawrence Bair, Digital Equipment Corporation, USA and Gerard Ghibaudo, LPCS/ENSERG, France
Co-Chairs: Giovanni Soncini, University of Trento/IRST, Italy and Alfred Papp, Siemens AG, Germany
| Robert A. Ashton |
| Lucent Technologies, Bell Labs |
| 9333 S. John Young Parkway |
| Orlando, FL 32819, USA |
| Tel: (407)345-7531 Fax: (407) 345-7577 |
| e-mail: rashton@lucent.com |
| Lawrence A. Bair |
| Digital Equipment Corporation |
| 77 Reed Rd., HL02-3/L12 |
| Hudson, MA 01749, USA |
| Tel: (508)568-4379 Fax: (508)568-4681 |
| e-mail: bair@subpac.enet.dec.com |
| Loren W. Linholm |
| National Institute of Standards & Technology |
| B-360 Technology Bldg. |
| Gaithersburg, MD 20899, USA |
| Tel: (301) 975-2052 Fax: (301) 948-4081 |
| e-mail: linholm@apollo.eeel.nist.gov |
| Alfred C. Ipri |
| David Sarnoff Research Center |
| 201 Washington Rd. |
| Princeton, NJ 08540, USA |
| Tel: (609) 734-3209 Fax: (609) 734-2221 |
| e-mail:al_ipri@maca.sarnoff.com |
| Takashi Ohzone |
| Toyama Prefectural University |
| Kurokawa, Kosugi-Machi, Imizu-Gun, |
| Toyama, 939-03, Japan |
| Tel: +81-776-56-7500 Ext. 501Fax: +81-766-56-6172 |
| e-mail: ohzone@pu-toyama.ac.jp |
| Anthony J. Walton |
| EE Dept., University of Edinburgh |
| Kings Bldg. |
| Edinburgh, EH9 3JL, UK |
| Tel: +44-131-650-5620 Fax: +44-131-650-6554 |
| e-mail: ajw@ee.ed.ac.uk |
| Martin G. Buehler |
| Jet Propulsion Laboratory |
| California Institute of Technology |
| Pasadena, CA 91109, USA |
| Tel: (818) 354-4368 Fax: (818) 393-4820 |
| e-mail: martin.g.buehler@jpl.nasa.gov |
| James Reedholm |
| Reedholm Instruments |
| P.O. Box 1849 |
| Georgetown, TX 78627, USA |
| Tel: (512) 869-1935 Fax: (512) 869-0992 |
| e-mail: jsreedholm@aol.com |
| Charles N. Alcorn | Lockheed-Martin (USA) |
| Kunihiro Asada | University of Tokyo (Japan) |
| Robert Ashton | Lucent Technologies, Bell Labs (USA) |
| Lawrence A. Bair | Digital Equipment Corporation (USA) |
| Martin G. Buehler | Jet Propulsion Laboratory (USA) |
| Gordon Claudius | Rockwell International (USA) |
| Michael W. Cresswell | National Inst. of Standards & Technology (USA) |
| Gerard Ghibaudo | LPCS/ENSERG (France) |
| Kazunari Honma | Sanyo Electric (Japan) |
| Yoshiaki Hagiwara | Sony Corporation (Japan) |
| Ed B. Hakim | US Army Labcom (USA) |
| Norio Hirashita | Oki Electric Industry (Japan) |
| Alfred C. Ipri | David Sarnoff Research Center (USA) |
| Kjell Jeppson | Chalmers University of Technology (Sweden) |
| Hiroshi Koyama | Mitsubishi Electric Corporation (Japan) |
| Jun Kudo | Sharp Corporation (Japan) |
| Yukinori Kuroki | Kyushu University (Japan) |
| Loren W. Linholm | National Institute of Standards & Technology (USA) |
| Emilio Lora-Tamayo | Universidad Autonoma de Barcelona (Spain) |
| Michael Mitchell | Honeywell, Inc. (USA) |
| Takashi Ohzone | Toyama Prefectural University (Japan) |
| Alfred Papp | Siemens AG (Germany) |
| Harold Parks | University of Arizona (USA) |
| Mitsuchika Saito | Hewlett Packard Laboratories (Japan) |
| W. Sansen | Katholieke Univ. Leuven (Belgium) |
| Nobuo Sasaki | Fujitsu Laboratories (Japan) |
| Akella Satya | IBM Corporation (USA) |
| Dieter Schroeder | Arizona State University (USA) |
| Masakazu Shimaya | NTT LSI Laboratories (Japan) |
| Johnny K. O. Sin | Hong Kong Univ. of Sci. & Tech. (Hong Kong) |
| Giovanni Soncini | University of Trento/IRST (Italy) |
| Yoichi Tamaki | Hitachi Corporation (Japan) |
| Hans P. Tuinhout | Philips Research (Netherlands) |
| Vance Tyree | Information Sciences Institute (USA) |
| Anthony J. Walton | University of Edinburgh (UK) |
| Toshiharu Watanabe | Toshiba Corporation (Japan) |
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School Attending:_______________________________
Graduation Year ______________________________
______________________________________________ NAME ______________________________________________ COMPANY ________________________________________________________ ADDRESS ________________________________________________________ CITY/STATE/ZIP/COUNTRY ________________________________________________________ TELEPHONE/FAX NUMBER ARRIVAL DATE: ____________________________________ DEPARTURE DATE: ___________________________________ Number of Persons: ____________________________ Rates for single or double occupancy: $110.00 + Tax RESERVE EARLY: RESERVATIONS RECEIVED AFTER FEBRUARY 15, 1997 WILL BE ON A SPACE AVAILABLE BASIS ONLY. ONE NIGHT'S DEPOSIT IS REQUIRED TO SECURE YOUR ROOM RESERVATION. ______________________________________________ Credit Card Type Credit Card Number ____________________ Expiration Date ______________________________________________ Name as it appears on card ________________________________________________________ Signature Cancellation Policy: To receive refund on room reservations, cancellations must be received seven days prior to arrival. Send this accommodation form to: DOUBLETREE HOTEL at FISHERMAN'S WHARF Two Portola Plaza Monterey, CA 93940 Tel: 1-800-222-TREE Tel: 1-408-649-4511 Fax: 1-408-649-3109