Smart Microsystems

Anthony Walton
Prof Anthony Walton
MEMS Pressure Sensor

A silicon based pressure sensor with polysilicon resistor bridge fabricated at the SMC (a collaboration with the Institute for System Level Integration)

Micro Heater Array

A 96 element heater/sensor array for controlling and monitoring micro-cooling systems

Smart Microsystems

The term Smart Microsystem refers to micro and nano-scale devices that combine electronic integrated circuits with additional, non-electronic components on a single substrate; thereby providing additional functionality. Such microsystems can be sub-divided into a myriad of application groups, including chemical, biological, optical, mechanical, electromagnetic and fluidic. The substrates on which Smart Microystems are fabricated are predominantly CMOS silicon but may also include compound semiconductors, glass, sapphire and flexible polymers. The sizes of the substrates could be anywhere from 200mm diameter wafers down to millimetre scale chips.

Microelectronic Test Structures

Microelectronic Test Structures consists of lithographically formed patterns. These structures are separately designed to aid the characterisation of microelectronic and micromachining processes. Electrical, optical, or physical measurements are made on these test structures for the purpose of device evaluation and process optimisation. Data analysis techniques that are applied to facilitate these tasks form an essential element of test structure related activities.

Prof Anthony Walton is Professor of Microelectronic Manufacturing at the University of Edinburgh in the School of Engineering. He is a member of the School's Institute for Micro and Nano Systems and the Director of the Institute for Integrated Systems (IIS) - a joint research institue with staff from the University of Edinburgh, Heriot Watt and the UK Astronomy Technology Centre.

For the past 30 years he has been actively involved with the semiconductor industry in a number of areas associated with silicon processing which includes both IC technology and microsystem/MEMS. This includes microelectronic test structures, MEMS (Micro Electro Mechanical Systems), yield improvement, Design for Manufacturability (DFM) and Technology Computer Aided Design (TCAD). His present interests also include the applications of micro and nanotechnology to biotechnology, organometallic materials for semiconductor applications, sensors and interconnect technology. He also has had a long interest in integrating new technologies (such as MEMS) and materials with foundry CMOS to create smart microsystems. He has won a number of awards for his work, and has published over 300 papers. Professor Walton was instrumental in setting up the Scottish Microelectronics Centre of which he is currently a Director.